JPH0479541B2 - - Google Patents

Info

Publication number
JPH0479541B2
JPH0479541B2 JP60040786A JP4078685A JPH0479541B2 JP H0479541 B2 JPH0479541 B2 JP H0479541B2 JP 60040786 A JP60040786 A JP 60040786A JP 4078685 A JP4078685 A JP 4078685A JP H0479541 B2 JPH0479541 B2 JP H0479541B2
Authority
JP
Japan
Prior art keywords
thin film
sensitive element
moisture
alkyl
insulating substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60040786A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61200454A (ja
Inventor
Kazuyuki Ozaki
Kiwamu Ishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nok Corp
Original Assignee
Nok Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nok Corp filed Critical Nok Corp
Priority to JP4078685A priority Critical patent/JPS61200454A/ja
Publication of JPS61200454A publication Critical patent/JPS61200454A/ja
Publication of JPH0479541B2 publication Critical patent/JPH0479541B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP4078685A 1985-03-01 1985-03-01 薄膜感湿素子 Granted JPS61200454A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4078685A JPS61200454A (ja) 1985-03-01 1985-03-01 薄膜感湿素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4078685A JPS61200454A (ja) 1985-03-01 1985-03-01 薄膜感湿素子

Publications (2)

Publication Number Publication Date
JPS61200454A JPS61200454A (ja) 1986-09-05
JPH0479541B2 true JPH0479541B2 (en]) 1992-12-16

Family

ID=12590302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4078685A Granted JPS61200454A (ja) 1985-03-01 1985-03-01 薄膜感湿素子

Country Status (1)

Country Link
JP (1) JPS61200454A (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59142447A (ja) * 1983-02-04 1984-08-15 Japan Synthetic Rubber Co Ltd 湿度センサーの製造方法

Also Published As

Publication number Publication date
JPS61200454A (ja) 1986-09-05

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